Delft University of Technology
Meta-instrument
An opto-mechanical platform for imaging near-field optical instruments
Bijster, Roy; Herfst, R.; Klop, W; Hagen, R.; Sadeghian Marnani, Hamed
Publication date 2016
Document Version Final published version
Citation (APA)
Bijster, R., Herfst, R., Klop, W., Hagen, R., & Sadeghian Marnani, H. (2016). Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments. Poster session presented at 13th International Workshop on Nanomechanical Sensing, Delft, Netherlands.
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Meta-Instrument: An Opto-Mechanical Platform
for Imaging Near-Field Optical Instruments
Roy Bijster
1,2, Rodolf Herfst
2, Wimar Klop
2, Ronald Hagen
3, Hamed Sadeghian
21
Structural Optimization and Mechanics, Delft University of Technology
2
Department of Optomechatronics, Netherlands Organisation for Applied Scientific Research TNO
2Department of Optics, Netherlands Organisation for Applied Scientific Research TNO
1 3 4 5 1 2 4 6 1 2 4 6
Nanopositioning MEMS device (1) Transparant window, (2) Electronic leads,
(3) Electrodes, (4) Moving plate (SiC), (5) Air gap of 500 nm, (6) Leaf springs
Download this poster and the abstract to your phone!
Second generation
(1) MEMS nanopositioning device
(2) Mirror surfaces for interferometers
(3) Leaf spring that preloads piezo element (4) Piezo element for fine positioning
(5) Fiber interferometer
(6) Leaf spring that clamps the carbon rod (7) Carbon rod of the coarse positioning
2 1 3 4 5 6 7 12.6 mm 21.5 mm
Combined fine and coarse positioning
The new linear actuator can be used for fine positioning and coarse stepping at 0.32 μm/step and velocities up to 3.2 mm/s.
Fine positioning stage The stage and interferometers show a large signal
coherence up to 10 kHz. This allows for a high bandwidth tracking of the sample.
Gain (dB) 20 0 -20 -40 -60 Frequency (Hz) 100 105 Coherence (-) 1 0.5 0 Frequency (Hz) 100 105 Fiber interferometers as distance sensors
Measure the motion of the finepositioning stage. By
stabilizing the temperature of the optical path
difference, the noise is
reduced from 70 nm r.m.s. to 10 nm r.m.s. over 70 kHz. Configurable OPD Fixed OPD 10-12 10-16 10-20 10-24 PSD (m 2 Hz -1/2 ) 0.01 1 100 10000 Frequency (Hz) 1 10 100 Cum. amplitude (nm) 0.01 1 100 10000 Frequency (Hz) Phase (deg) 105 102 10-2 Frequency (Hz) 100 105 0 Axial load (N) 0.8 0 0.5 St epsiz e (μm) 0 2 4 6 Displac emen t (μm) 0 0 9 Time (ms) Steps (-) 0.00 N 0.36 N 0.50 N 0.60 N 0.71 N 12
