Neutral gas flow velocity profiles in the jet plasmachemical reactor

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Volume 40, Issue 5 , 1990, Pages 449-452

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doi:10.1016/0042-207X(90)90243-R

Neutral gas flow velocity profiles in the jet plasma- chemical reactor

L Bárdo and I t pánek G Karwasz

Czechoslovak Academy of Sciences, Institute of Physics, Na Slovance 2, 180 40, Prague 8, Czechoslovakia Polish Academy of Sciences, Institute of Fluid Dynamics, 80–952, Gdansk-Wrzescz, Poland

Received 9 October 1989. Available online 11 November 2002.

Abstract

Radial and axial velocity profiles in the nitrogen flowing from the simple low pressure cylindrical jet were measured by the small size Prandtl probe. Guassian shapes of the radial velocity profiles were found.

Supersonic values of the gas velocity up to M = 2 were measured at the jet axis, even at several

centimeters from the nozzle mouth. Comparisons of the velocity profiles with corresponding profiles of the film thickness created after Jet PCVD process in the same reactor are discussed.

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Volume 40, Issue 5 , 1990, Pages 449-452

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ScienceDirect - Vacuum : Neutral gas flow velocity profiles in the jet plasma-chemical reactor

http://www.sciencedirect.com/science?_ob=ArticleURL..._userid=554534&md5=089d5d028a441e80b888e586c4a6469b (2 of 2)25/07/2006 1:10:39 PM