Procedia Engineering 87 ( 2014 ) 1410 – 1413
1877-7058 © 2014 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/3.0/).
Peer-review under responsibility of the scientific committee of Eurosensors 2014 doi: 10.1016/j.proeng.2014.11.707
ScienceDirect
Available online at www.sciencedirect.com
(8526(16256WKH;;9,,,HGLWLRQRIWKHFRQIHUHQFHVHULHV
$/RVV\)DEU\3HURWEDVHG2SWLFDO)LOWHUIRU1DWXUDO*DV$QDO\VLV
13$\HUGHQ 0*KDGHUL*GH*UDDI5):ROIIHQEXWWHO
Electronic Instrumentation Laboratory, Microelectronics Department, Faculty of EEMCS, Delft University of Technology, Delft, Netherlands
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eywords:JDVVHQVRURSWLFDOILOWHULQIUDUHGVSHFWURVFRS\ ,QWURGXFWLRQ
1DWXUDO JDV KDV EHHQ D PDMRU VRXUFH RI HQHUJ\ HVSHFLDOO\ LQ WKH 1HWKHUODQGV GXH WR WKH DYDLODELOLW\ RI ORFDO UHVRXUFHV LQ *URQLQJHQ 7KH GHSOHWLRQ RI QDWXUDO UHVRXUFHV ZLOO IRUFH D WUDQVLWLRQ IURP QDWXUDOJDV RI ZHOONQRZQ FRPSRVLWLRQ *JDV WRZDUGV JDV PL[WXUHV RI OHVV VWDEOH FRPSRVLWLRQ ZKLFK PD\ FRQWDLQ KLJKFDORULILFYDOXH JDV +JDVOLTXHILHGQDWXUDOJDV/1*DQGELRJDV>@7DEOH7KLVFDOOVIRUFRPSRVLWLRQPHDVXUHPHQWVWRHQVXUH VDIH DQG FOHDQ FRPEXVWLRQ DQG FRQVHTXHQWO\ UHTXLUHV VPDOO UREXVW DQG ORZFRVW JDV VHQVRUV LQ KLJKYROXPH SURGXFWLRQ &RUUHVSRQGLQJDXWKRU7HOID[ E-mail address:QSD\HUGHQ#WXGHOIWQO
© 2014 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/3.0/).
1411
N.P. Ayerden et al. / Procedia Engineering 87 ( 2014 ) 1410 – 1413
7DEOH7\SLFDOFRPSRVLWLRQRI*JDV+JDVDQG/1*
&+>PRO@ &+>PRO@ &+>PRO@ &+>PRO@
**DV
+*DV
/1*
7KH PDLQ FRPSRQHQWV RI QDWXUDO JDV DUH K\GURFDUERQV $OWKRXJK WKH PRVW UHOHYDQW JDVHV KDYH VLJQLILFDQW DEVRUSWLRQSHDNVLQWKHPZDYHOHQJWKUDQJHWKHLUVSHFWUDDUHYHU\VLPLODU)LJXUH7KXVGLVWLQJXLVKLQJ WKHVH JDVHV UHTXLUHV D KLJKUHVROXWLRQ VSHFWURVFRSLF WHFKQLTXH 2SWLFDO DEVRUSWLRQ VSHFWURVFRS\ LV D SURPLVLQJ FRPSURPLVHEHWZHHQFRVWDQGSHUIRUPDQFHEHFDXVHRIIHDWXUHVVXFKDVVHOIUHIHUHQFLQJDQGQRQGHVWUXFWLYHin situ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
$ VSHFWURPHWHU LV FRPSRVHG RI D OLJKW VRXUFH DQG D VDPSOH FKDPEHU LQ DGGLWLRQ WR WKH RSWLFDO ILOWHU DQG WKH GHWHFWRUDUUD\7KHVDPSOHFKDPEHULQZKLFKWKHOLJKWSURSDJDWHVWKURXJKWKHVDPSOHRFFXSLHVWKHELJJHVWVSDFHLQ DVSHFWURPHWHU%\XVLQJWKHPXOWLSOHUHIOHFWLRQVLQWKHUHVRQDWRUOD\HURIDQ/92)DVWKHSURSDJDWLRQWKURXJKWKH VDPSOHRQHFDQDFKLHYHWKHXOWLPDWHPLQLDWXUL]DWLRQRIDVSHFWURPHWHU
)LJXUH$EVRUSWLRQFRHIILFLHQWRIYDULRXVJDVHVFDOFXODWHGXVLQJ*JDVFRQFHQWUDWLRQVDQGWKH1,67GDWDEDVHDWURRPWHPSHUDWXUHIRUEDU WRWDOSUHVVXUHLQWKHPZDYHOHQJWKUDQJH>@
1412 N.P. Ayerden et al. / Procedia Engineering 87 ( 2014 ) 1410 – 1413
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Ȝ QPWKHPD[LPXPRSHUDWLQJRUGHUUHVXOWVDVIRUDQ
)65RIQP
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
1413
N.P. Ayerden et al. / Procedia Engineering 87 ( 2014 ) 1410 – 1413
&RQFOXVLRQ
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
$FNQRZOHGJHPHQWV
7KLVZRUNKDVEHHQVXSSRUWHGE\WKH'XWFKWHFKQRORJ\IRXQGDWLRQ67:XQGHUJUDQW'(/
5HIHUHQFHV
>@ 1,670DVV6SHF'DWD&HQWHUDQG6(6WHLQ,QIUDUHG6SHFWUDLQNIST Chemistry WebBook, NIST
Standard Reference Database Number 693-/LQVWURPDQG:*0DOODUG(GVHG*DLWKHUVEXUJ0'
1DWLRQDO,QVWLWXWHRI6WDQGDUGVDQG7HFKQRORJ\
>@ 5HSRUWRQ*DV&RPSRVLWLRQ'LUHFWRUDDWJHQHUDDOYRRU(QHUJLH7HOHFRPHQ0DUNWHQ
>@ -+RGJNLQVRQDQG537DWDP2SWLFDOJDVVHQVLQJDUHYLHZMeasurement Science and Technology, YROS
>@ 13$\HUGHQ0*KDGHUL0)6LOYD$(PDGL3(QRNVVRQ-+&RUUHLD, et al.'HVLJQIDEULFDWLRQ DQGFKDUDFWHUL]DWLRQRI/92)EDVHG,5PLFURVSHFWURPHWHUVSS77
>@ *+HUQDQGH])DEU\3HURWZLWKDQDEVRUELQJHWDORQFDYLW\Applied Optics, YROSS
>@ $(PDGL+:X*GH*UDDIDQG5:ROIIHQEXWWHO'HVLJQDQGLPSOHPHQWDWLRQRIDVXEQPUHVROXWLRQ PLFURVSHFWURPHWHUEDVHGRQD/LQHDU9DULDEOH2SWLFDO)LOWHUOpt. Express, YROSS >@ 7KH(VVHQWLDO0DFOHRGLHHG7KLQ)LOP&HQWHU,QFSSVRIWZDUHSDFNDJHIRUWKH
GHVLJQDQDO\VLVPDQXIDFWXUHDQGWURXEOHVKRRWLQJRIWKLQILOPRSWLFDOFRDWLQJV
)LJXUH2SWLFDOWKLQILOPVLPXODWLRQIRUOD\HUVSHUPLUURUORVV\/92)GHVLJQZLWKPHWKDQHLQWKHFDYLW\DVFRPSDUHGWRWKHWUDQVPLWWDQFHRI PHWKDQHFDOFXODWHGRYHUDQPPRSWLFDOSDWK7KHFRPELQHGHIIHFWRIKLJKPLUURUUHIOHFWDQFH!DQGWKLFNUHVRQDWRUPUHVXOWVLQ DQHIIHFWLYHRSWLFDOSDWKOHQJWKRIPP